五月 19, 2025

Our collaboration with the Laboratoire de Physique des Plasmas (LPP) at Ecole Polytechnique in France successfully deployed the Synertia® RF Generator to support advanced plasma research. This partnership, which enhanced the accuracy and control of experiments, showcases the vital role of industry-academic collaborations in driving scientific innovation.

Research institute

Laboratoire de Physique des Plasmas (LPP), École Polytechnique
91128 Palaiseau Cedex, France
www.lpp.polytechnique.fr

About

The Laboratory of Plasma Physics (LPP) was created in January 2009 and pursues research into all fields of plasma physics, from hot to cold plasmas and from laboratory to space plasmas, combining theoretical, simulation and experimental approaches.

Comet products

Quick access

At Comet Plasma Control Technologies, we are proud to announce a significant milestone in our ongoing commitment to advancing scientific and technological innovation.  In spring 2024, we embarked on a successful collaboration with the prestigious Laboratory of Plasma Physics (LPP) at Ecole Polytechnique in France to deploy our cutting-edge Synertia® RF Generator in their high-level research initiatives. The project, which centers on an experimental study of Radio Frequency Capacitively Coupled Plasmas (RF CCP) in oxygen-argon mixtures, delves into complex plasma parameters such as plasma impedance, electron density, and other critical measurements. This kind of research is essential for a deeper understanding of plasma physics, which has wide-reaching applications in fields ranging from materials science to semiconductor manufacturing and environmental sustainability.

When the LPP team initially approached us, their primary requirement was for a controlled, tailored waveform—something that our Synertia® RF Generator wasn’t originally designed to address. However, the flexibility and advanced capabilities of our generator quickly became apparent. The Synertia® RF Generator provided several key features that were crucial for the success of this research, including:

Automatic frequency tuning

Optimizing performance with minimal manual adjustments, ensuring consistent and reliable results.

 

Precise RF measure- ments

Delivering accurate data that empowers researchers to draw meaningful conclusions and make informed decisions.

User-friendly interface

Providing real-time control and easy visualization of plasma variations, which greatly simplified the process for researchers, enhancing both productivity and accuracy.

Multi-level pulsing

Allowing for sophisticated control over experimental setups, which is critical in advanced plasma studies.

Click image to enlarge

Click image to enlarge

Click image to enlarge

Click image to enlarge

"Integrating Comet's Synertia® RF Generator into our research allowed us to achieve a level of accuracy and reliability that was previously unattainable. It truly enhanced the quality of our work."

Mrs. Shu Zhang
PhD Student in plasma physics
Laboratoire de Physique des Plasmas (LPP) at Ecole Polytechnique

Our partnership with CNRS-Ecole Polytechnique exemplifies the power of collaboration between industry and academic research. Working alongside leading scientists and research institutions is crucial in advancing the field of plasma physics and ensuring that the tools and technologies we develop meet the real-world challenges faced by researchers.

Find out more about the product solution used in the scientific research.

Synertia® RF Generator

Enabling the unprecedented power delivery control required by
plasma process tools for the next generation of microchips.

Product range

At Comet Plasma Control Technologies, we’re committed to driving innovation through partnerships that enhance our products and contribute to scientific discoveries. By collaborating with research centers, we’re shaping the future of plasma technologies and advancing knowledge that can impact industries from manufacturing to medicine. If you are driven by curiosity, contact us!

最近更新

February 11-13, 2026 in Seoul, South Korea

一月 13, 2026

与我们一起在韩国半导体展上为新技术赋能!我们的全套射频电源系统将在三楼 C 厅 #B920号展位展出。请参观 Synertia®,Comet 的集成射频功率传输平台,实现前所未有的功率控制。

Read more

December 17-19, 2025 in Tokyo, Japan

十一月 18, 2025

我们的等离子体控制专家诚挚邀请您体验功能卓越的射频传输平台 Synertia®。该平台将射频电源、射频匹配器与真空电容器实现无缝整合,能够让您实时掌握等离子体工艺的相关情况。

Read more

November 18-21, 2025 in Munich, Germany

十月 07, 2025

我们的等离子体控制专家诚挚邀请您体验功能卓越的射频传输平台 Synertia®。该平台将射频电源、射频匹配器与真空电容器实现无缝整合,能够让您实时掌握等离子体工艺的相关情况。

Read more