New performance demands make innovation essential

The demand for improved performance by ever-smaller chips has increased the number of etch/deposition processes at chip manufacturers and has led to faster processes and more frequent, smaller steps.

Fifteen years ago, the standard was around 1 m cycles per year. Now, the baseline is more along the lines of 1 m cycles per three months or even less. The driving speed has increased significantly over the years, too: Up to 1200_RPM are required today, up from just 180 _RPM – 360_RPM originally.

Given the increased performance requirements in relation to speed and number of cycles of Matching Networks, and in turn Vacuum Capacitors, the lifetime of conventional Vacuum Capacitors – which is mainly determined by time-to-failure of moving parts like bellows or drive systems – has decreased significantly.

The necessary speed and raised number of cycles are challenging for all components of the drive system of a Vacuum Capacitor and lifetime is limited due to friction and wear of screw and nut.  Residues of metal particles mixed with lubricant generates a pasty mixture which leads to increased torque and eventually to failures. Increased torque may also cause a blocked lead screw and subsequently a blocked drive system.

The need for new technologies was clear.