Synertia® - 問題解決を含む

7月 06, 2023

Synertia®は、コメット社の統合RF電力供給プラットフォームであり、多層次世代メモリーやマイクロチップ製造に不可欠な原子スケールのプラズマプロセスの複雑性を管理することができる。

When Comet developed Synertia®, it was not only building a new generation of RF Power Generators. It was also building a comprehensive development, testing and qualification infrastructure unmatched in its commitment to customer support – including 24/7 troubleshooting availability. Read on to learn why the Synertia® RF Power Delivery Platform is so much more than a product.

Full customer orientation with Synertia®

Worldwide teams

Specialists in high-frequency technology, embedded software, material science, digitalization and more ensure Comet customers get the best and immediate R&D support around the clock (and, if needed, on site).

Modern environment

Comet’s high-power RF smartLABs form a worldwide interlinked lab environment for prototyping, in-the-loop testing, and automated data-driven design verification. This modern environment allows fastest qualification of new functions or provides the possibility of duplicating/analyzing field problems extremely fast. And not only our labs are fully dedicated to the needs of the semiconductor industry: The Synertia® RF power generators are manufactured at a new high-tech production site in Aachen.

Digital tool & process chain

Digitalized processes increase efficiency and enhance the collaboration between the global Comet team and customers worldwide. This enables more complex and sustainable solutions that are fully traceable and transparent.

Progressive technology

The signal processing and data streaming capabilities of the Synertia® RF Power Delivery Platform offer a new level of process and yield optimization. More than 1000 parameters are monitored and analyzed. Additionally, a high-frequency measurement studio built into the Synertia® RF Power Delivery Platform replaces the individual RF instruments that were previously required in each RF lab.

The bottom line?

New applications enabled by Synertia® and its data driven abilities help identify and solve problems faster to save time, improve yield, reduce downtime and launch processes faster.

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Overview

Product information

Benefits

Synertia®, Comet’s RF Power Delivery Platform, offers a new level of real-time insight. It saves time, boosts yield, reduces downtime, and improves the stability of the plasma process.

Product recommendations

Synertia® RFG 15/13

1.5 kW / 13.56 MHz

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Synertia® RFG 25/13

2.5 kW / 13.56 MHz

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Synertia® RFG 35/13

3.5 kW / 13.56 MHz

詳 細

Synertia® RFG 50/13

5 kW / 13.56 MHz

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2026年3月30日付で、Comet Yxlon GmbH は Comet Technologies Germany GmbH に社名を変更いたします。

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SEMICON Koreaで新しい技術を体験しましょう!当社のRF電力システム製品をフルラインナップで、ホール N2、ブース番号:2251にて展示いたします。 かつてない電力制御を可能にする、Cometの統合型RFパワーデリバリープラットフォームSynertia®をぜひ体感してください。

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Semicon Koreaで新しい技術を体験しましょう!当社のRF電力システム製品をフルラインナップで、ホールC:3、ブース番号:B920にて展示いたします。 かつてない電力制御を可能にする、Cometの統合型RFパワーデリバリープラットフォームSynertia®をぜひ体感してください。

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