Features

  • Designed for typical semiconductor applications around 5 kW
  • Optimized bellows design for high power operations
  • Optimized drive system for fast tuning
  • Frequency range up to 162 MHz
  • High current capability relative to small size
  • Interchangeable due to uniform size
  • Standardized 42 mm quadratic mounting flange
  • Available as a motorized and non-motorized vacuum capacitor

Applications

  • Semiconductor
  • Flat Panel Display 

Technical Specifications

Capacitance Cmax range
30 - 2000 pF
Upt range  3 - 20 kV

max. current Irms at 13.56 MHz

54 - 94 Arms
Inductance  ≤ 9 nH
Diameter  55, 64 and 75 mm
Height  133 - 142 mm
Cooling system Convection
RoHS conform Available

Questions?

Contact

Talk to us

Data Sheets

Service Bulletins

Product applications & technical background

All Service Bulletins

Advanced Technologies

Unbeaten features improve your performance

Discover