Features
- Designed for typical semiconductor applications around 5 kW
- Optimized bellows design for high power operations
- Optimized drive system for fast tuning
- Frequency range up to 162 MHz
- High current capability relative to small size
- Interchangeable due to uniform size
- Standardized 42 mm quadratic mounting flange
- Available as a motorized and non-motorized vacuum capacitor
Applications
- Semiconductor
- Flat Panel Display
Technical Specifications
Capacitance Cmax range |
30 - 2000 pF |
Upt range | 3 - 20 kV |
max. current Irms at 13.56 MHz |
54 - 94 Arms |
Inductance | ≤ 9 nH |
Diameter | 55, 64 and 75 mm |
Height | 133 - 142 mm |
Cooling system | Convection |
RoHS conform | Available |
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