Features

  • Designed for typical semiconductor applications around 5 kW
  • Optimized bellows design for high power operations
  • Optimized drive system for fast tuning
  • Frequency range up to 162 MHz
  • High current capability relative to small size
  • Interchangeable due to uniform size
  • Standardized 42 mm quadratic mounting flange
  • Available as a motorized and non-motorized vacuum capacitor

Applications

  • Semiconductor
  • Flat Panel Display 

Technical Specifications

Capacitance Cmax range
 30 - 2000 pF
Upt range  3 - 20 kV

max. current Irms at 13.56 MHz

 54 - 94 Arms
Inductance  ≤ 9 nH
Diameter  55, 64 and 75 mm
Height  133 - 142 mm
Cooling system Convection
RoHS conform Available
Uni-Con product range

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