Features

  • Reduced electrical losses and inductance of bellows enable high currents even at frequencies ≥ 60 MHz
  • Available with water cooling
  • Rugged construction
  • Standardized six hole mounting flanges
  • Very accurate C-curve available
  • Mostly used for high power semiconductor applications
  • Available as a motorized and non-motorized vacuum capacitor

Applications

  • Semiconductor
  • Flat Panel Display 

Technical Specifications

Capacitance Cmax range
80 - 2000 pF
Upt range  10 - 25 kV

max. current Irms at 13.56 MHz

57 - 152 Arms
Inductance  ≤ 6 nH
Diameter  85 mm
Height  155 - 169 mm
Cooling system Convection, Water, Hybrid
RoHS conform Available

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