Features
- Designed for typical semiconductor applications
- Optimized bellows design for high power operations
- Optimized drive system for fast tuning
- High current capability relative to small size
- Interchangeable due to uniform size
- Standardized 42 mm quadratic mounting flange
- Available as a motorized and non-motorized vacuum capacitor
- Ultra Life feature applicable for selected types
Applications
Technical Specifications
| Capacitance Cmax range |
30 - 2000 pF |
| Upt range | 3 - 37 kV |
|
max. current IRMS at 13.56 MHz |
16 - 107 ARMS |
| Inductance | ≤ 11 nH |
| Diameter | 55, 64, 75 mm |
| Height | 128 - 141 mm |
| Cooling system | Convection |
| RoHS conform | Available |
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