Features

  • Designed for high power flat-panel (LCD, FPD) applications over 50 kW
  • High voltage and high current capabilities
  • Enhanced water cooling system allows industry water with pressure up to 6 bars
  • Typical frequency range between 2 MHz and 40 MHz
  • Standardized mounting flanges
  • Long bellows lifetime
  • Drive system with lead-screw-coating for lifetime over 1 million cycles
  • Available as a motorized and non-motorized vacuum capacitor

Applications

  • Semiconductor
  • Flat Panel Display 

Technical Specifications

Capacitance Cmax range
350 - 2500 pF
Upt range  15 - 40 kV

max. current IRMS at 13.56 MHz

300 ARMS
Inductance  ≤ 15 nH
Diameter  143 mm
Height  255 mm
Cooling system Water
RoHS conform Available

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