Longer life drive system
Increase the reliability and useful lifetime of your Impedance Matching Network with the best Vacuum Capacitors along with the latest drive system technology.
To enable the technology inflections in the semiconductor industry, more RF applications are necessary. The increasing number of etch/deposition processes results in an increased number of necessary tools. Production processes become faster, single steps are shorter and more frequent, and the demands on equipment grow.
The lifetime of Vacuum Capacitors – which are the critical parts of Impedance Matching Networks – is mainly determined by time-to-failure of its moving parts, the bellows and drive systems. Comet has continually improved its capacitors over many years to meet and answer the formidable challenging requirements of the semiconductor industry.
Drive system components
last at least
3 x longer
- Designed for 600 and 1200 RPM for fast match tuning
- Lifetime up to 100 million turns
- RoHS compliant
- Available for most Comet capacitors
- Customized types available
Avoid system breakdowns
Friction in the drive system may cause particle formations, increased torque, leading to binding and finally result in failure. Comet Ultra Life drive systems increase capacitor and matching network lifetime by three or more times over existing products. Comet improvements ensure trouble free operation and lifetime up to 100 million turns.
Drive System Lifetime Comparison