Synertia® RF Power Delivery Platform
Synertia®
RF Matching Network
Built for speed, accuracy, precision and repeatability.
The Synertia® RFM works in powerful synergy with the Synertia® RFG. Precise sensors and an enhanced tuning algorithm in the matching network ensure consistent and stable plasma processes.
Features
- Advanced customer-accessible metrology data
- Real-time data streaming:
Full access to all available data from Synertia® RFG and RFM devices that allows reaction in real-time to change, accelerate process development and
post-analyze incidents - On-board monitoring and diagnostics to assist with preventive maintenance and enable actionable insights for more complex plasma applications
- Integration of Comet Vacuum Capacitors:
Standard and customized capacitor designs, equipped with advanced technologies such as Ultra Life drive system or XtraVolt features for low frequency applications
Benefits
- Continuous process improvement via real time signal processing and data collection
- Superior process control and repeatability with fully digital and customizable controls
- Consistent, stable RF plasma with enhanced tuning algorithm
- Reduced total cost of ownership with improved MTBF and enhanced reliability
- Robust design with RF expertise, state-of-the-art modeling/virtual prototyping and extensive library of RF tuning circuits
Technical data
| Match types | Single frequency Dual frequency |
| Available matching topologies | L, T, and Pi match |
| Frequency range | 400 kHz - 60 MHz |
| Output V/l | max. current (~150 APEAK) max. voltage (10 kVPEAK) |
| Input power | up to 15 kW |
| Communication interface | EtherCAT®, RS232, analog, Ethernet |
| Pulsing | Single, dual and multi-level |
| Pulsing state time | 5 µsec to 1 second |
| Pulsing capability | 0.5 Hz to 100 kHz |
| External pulse sync | TTL |
| Advanced features | ± 10% frequency range |
| Optional sensors | Vpp, Vdc and others |
| Input voltage | 24 VDC |
| Tune time | < 1 sec depending on pre-set points |
| Tuning range | Depends on unit frequency and on the tuning coil installed |
Flyer
Synertia® Platform Flyer
Discover the powerful synergy between Synertia RFM and Synertia RFG in Comet's integrated RF Power Delivery Platform.
RF Power Catalog
A compact summary of Comet's RF expertise and the product range can also be found in our catalogue. Have a look online or order your print version.