Synertia® RF Power Delivery Platform
Synertia®
RF Matching Network
Built for speed, accuracy, precision and repeatability.
With its strong capabilities for data capture and on-board analysis for actionable insights, Synertia® RFM enables more complex plasma applications than have ever been possible before: a new level of RF control.
Features
- Advanced tuning algorithms for improved tuning speeds and process control
- Advanced customer-accessible metrology data
- Wide-band V/I sensors with high fidelity and sensitivity
- Track and tune when RF fundamental frequency is varied up to ± 10 %
- Powerful programmable logic for signal processing and data collection
- On-board monitoring and diagnostics functions
- Standard and customized capacitor designs
- Intuitive graphical user interface
Benefits
- Ultra-fast, consistent, stable plasma control
- Superior process control and repeatability with fully digital and customizable controls
- Continuous process improvement via real time signal processing and data collection
- Accelerate process development by quick event analysis and post-analyze incidents
Improved RFM Tuning time
< 500 msec depending on pre-set points
Technical data
| Match types | Single frequency Dual frequency |
| Available matching topologies | L, T, and Pi match |
| Frequency range | 400 kHz - 60 MHz |
| Output V/l | max. current (~150 APEAK) max. voltage (10 kVPEAK) |
| Input power | up to 15 kW |
| Communication interface | EtherCAT®, RS232, analog, Ethernet |
| Pulsing | Single, dual and multi-level |
| Pulsing state time | 5 µsec to 1 second |
| Pulsing capability | 0.5 Hz to 100 kHz |
| External pulse sync | TTL |
| Advanced features | ± 10% frequency range |
| Optional sensors | Vpp, Vdc and others |
| Input voltage | 24 VDC |
| Tune time | < 500 msec depending on pre-set points |
| Tuning range | Depends on unit frequency and on the tuning coil installed |
Flyer
Comet products may be protected by patents in the United States and other countries. For detailed information please consult our Virtual Patent Marking
Synertia® Platform Flyer
Discover the powerful synergy between Synertia RFM and Synertia RFG in Comet's integrated RF Power Delivery Platform.
RF Power Catalog
A compact summary of Comet's RF expertise and the product range can also be found in our catalogue. Have a look online or order your print version.