Synertia® RF Power Delivery Platform
Synertia®
RF Matching Network
Built for speed, accuracy, precision and repeatability.
The Synertia® RFM works in powerful synergy with the Synertia® RFG. Precise sensors and an enhanced tuning algorithm in the matching network ensure consistent and stable plasma processes.
Features
- Precise and repeatable input/output sensors
- Advanced multi-level pulsing with the ability to set custom tuning parameters
- Ability to work with a combination of various tuning elements
- Onboard monitoring and diagnostics to assist with preventive maintenance
- Ultra wide-band sensors
Benefits
- Continuous process improvement via real time signal processing and data collection
- Superior process control and repeatability with fully digital and customizable controls
- Consistent, stable RF plasma with enhanced tuning algorithm
- Reduced total cost of ownership with improved MTBF and enhanced reliability
- Robust design with RF expertise, state-of-the-art modeling/virtual prototyping and extensive library of RF tuning circuits
Technical data
| Frequencies | 400 kHz - 100 MHz |
| Input power | 600 W to 20 kW |
| Output V/l | max. current (~150 ARMS), max. voltage (10 kVpeak) |
| Pulsing | Single, dual and multi-level |
| User interface | EtherCAT®, RS232, analog, advanced user interface (ProfiNet® and DeviceNet® coming soon) |
| Optional sensor capabilities | Vpp, Vdc and others |
Flyer
Catalog
A compact summary of Comet's RF expertise and the product range can also be found in our catalogue. Have a look online or order your print version.
