Synertia® RF Power Delivery Platform
Synertia®
RF Generators
Unique performance accelerators
Users fully control the unique performance accelerators of Synertia® RFG, including repeatability, multi-level pulsing and high-speed communication. This responsiveness provides actionable insights and enables more complex plasma applications than have ever been possible before: a new level of deep control. Thus, higher yield is the result of Synertia®'s fast and agile process control, which delivers superior repatability, faster tuning, and custom wave-shaping.
13.56 MHz Synertia® RF Generators
Features
- Power accuracy and repeatability
- Multi-level pulsing (four user definable levels)
- Customizable frequency tuning per level
- Versatile arc management
- Digital metrology and intuitive graphical user interface
- Digital system control for advanced manufacturing technologies
Benefits
- Seamless integration into process systems
- Ultra-fast plasma process control
- Tighter repeatability delivers improved yield
- Fast configurable rise/fall time of pulsing
- Consistent process and wafer level uniformity
Technical data
| Synertia® 15/13 | Synertia® 50/13 | |
| Frequency | 13.56 MHz ± 10% | 13.56 MHz ± 10% |
| Output power | 1.5 W to 1500 W | 5 W to 5000 W |
| RF accuracy into 50 Ω | ± 1 % of setpoint or ± 0.3 W whichever is greater |
± 1 % of setpoint or ± 1 W whichever is greater |
| Pulse rate | 0.05 Hz to 100 kHz | 0.05 Hz to 100 kHz |
| Pulse rise / fall time | 320/240 ns | 650/240 ns |
| CEX | 400 kHz to 110 MHz | 400 kHz to 110 MHz |
| Frequency tuning | Within ± 10 % of nominal frequency | |
| Interfaces | EtherCAT®, RS232, RS485, analog | |
Flyer
Synertia® Platform Flyer
Discover the powerful synergy between Synertia RFM and Synertia RFG in Comet's integrated RF Power Delivery Platform.
RF Power Catalog
A compact summary of Comet's RF expertise and the product range can also be found in our catalogue. Have a look online or order your print version.