Unique performance accelerators

Users fully control the unique performance accelerators of Synertia® RFG, including repeatability, multi-level pulsing and high-speed communication. This responsiveness provides actionable insights and enables more complex plasma applications than have ever been possible before: a new level of deep control. Thus, higher yield is the result of Synertia®'s fast and agile process control, which delivers superior repeatability, faster tuning, and custom wave-shaping.

Features

• Power accuracy (+/-1% of setpoint) across the entire power range
• Auto frequency tuning (+/-10% of nominal frequency)
• Precise pulse management: pulse duration, duty cycle, rising/falling slopes, etc.
• Single-level and multi-level pulsing
• Independent frequency tuning per level
• Multiple arc management detection methods
• Power efficiency >70%
• Cable length independence
• Digital metrology and intuitive graphical user interface
• Digital system control for advanced manufacturing technologies
• Wide range of interfaces and communication protocols

Benefits

• Ultra-fast plasma process control
• Consistent wafer level uniformity
• Rapid response to impedance changes
• Rapid reduction of reflected power in all operating modes including multi-level pulsing
• Arc detection working with close-loop power control to minimize wafer scrap
• Quick event analysis and fast troubleshooting
• Seamless integration into OEM tools

RF Power Accuracy

Highly accurate power delivery within ± 10 % of nominal frequency

Multi-Level Pulse

Rapid response to impedance changes enable effective power delivery

Synertia® Platform Flyer

Discover the powerful synergy between Synertia RFM and Synertia RFG in Comet's integrated RF Power Delivery Platform.

RF Power Catalog

A compact summary of Comet's RF expertise and the product range can also be found in our catalogue. Have a look online or order your print version.