Synertia® RF Power Delivery Platform

Synertia®
RF Generators

Unique performance accelerators

Users fully control the unique performance accelerators of Synertia® RFG, including repeatability, multi-level pulsing and high-speed communication. This responsiveness provides actionable insights and enables more complex plasma applications than have ever been possible before: a new level of deep control. Thus, higher yield is the result of Synertia®'s fast and agile process control, which delivers superior repatability, faster tuning, and custom wave-shaping.

13.56 MHz Synertia® RF Generators

Synertia® RFG 15/13

1.5 kW / 13.56 MHz

Synertia® RFG 25/13

2.5 kW / 13.56 MHz

Synertia® RFG 50/13

5 kW / 13.56 MHz

Features

  • Power accuracy and repeatability
  • Multi-level pulsing (four user definable levels)
  • Customizable frequency tuning
  • Digital metrology and intuitive graphical user interface
  • Digital system control for advanced manufacturing technologies

Benefits

  • Seamless integration into process systems
  • Ultra-fast plasma process control
  • Tighter repeatability delivers improved yield
  • Fast configurable rise/fall time of pulsing
  • Consistent process and wafer level uniformity

Technical data

  Synertia® 15/13 Synertia® 50/13
Frequency 13.56 MHz 13.56 MHz
Output power 1.5 W to 1500 W 5 W to 5000 W
RF accuracy into 50 Ω ± 1 % of setpoint
or ± 0.3 W
whichever is greater
± 1 % of setpoint
or ± 1 W
whichever is greater
Pulse rate 0.05 Hz to 100 kHz
Pulse rise / fall time 300/240 ns 600/240 ns
CEX 400 kHz to 110 MHz
Frequency tuning Within ± 10 % of nominal frequency
Interfaces EtherCAT®, RS232, RS485, analog
(ProfiNet®, DeviceNet® etc.)

Flyer

NEW Flyer!

Read our new Synertia® Flyer. 


Catalog

A compact summary of Comet's RF expertise and the product range can also be found in our catalogue. Have a look online or order your print version.

Synertia® RFM

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