The future of plasma control.
Powerful command and control of plasma conditions at highest speed.
Synertia® is Comet's new integrated RF Power Delivery Platform that enables unprecedented power control. A system that allows to manage the complexities of multi-layer next-generation memory and atomic-scale plasma processes. Disruptive process technology in the plasma chamber, enabled by Comet's RF power sub-systems, makes wafer processing tools ready for the workloads of the future.
Synertia® is described as
1 + 1 = 3
Synertia® is the powerful synergy between RF Generator and RF Matching Networks. In Synertia® the unique, patented controls of Generator and Match interact at highest possible speeds. These actionable insights enable more complex plasma applications than have ever been possible before.
The Synertia® platform consists of RF Generators and RF Matching Networks with a wide range of frequencies and power levels.
Synertia® RF Power Delivery Platform
Synertia® RFG
Unique performance accelerators
Users fully control the unique performance accelerators of Synertia® RFG, including repeatability, multi-level pulsing and high-speed communication. This responsiveness provides actionable insights and enables more complex plasma applications than have ever been possible before: a new level of deep control. Thus, higher yield is the result of Synertia®'s fast and agile process control, which delivers superior repatability, faster tuning, and custom wave-shaping.
13.56 MHz Synertia® RF Generators
Features
- Power accuracy and repeatability
- Multi-level pulsing (four user definable levels)
- Customizable frequency tuning
- Digital metrology and intuitive graphical user interface
- Digital system control for advanced manufacturing technologies
Benefits
- Seamless integration into process systems
- Ultra-fast plasma process control
- Tighter repeatability delivers improved yield
- Fast configurable rise/fall time of pulsing
- Consistent process and wafer level uniformity
Technical data
| Synertia® 15/13 | Synertia® 50/13 | |
| Frequency | 13.56 MHz | 13.56 MHz |
| Output power | 1.5 W to 1500 W | 5 W to 5000 W |
| RF accuracy into 50 Ω |
± 1 % of setpoint |
± 1 % of setpoint |
| Pulse rate | 0.01 Hz to 100 kHz | |
| Pulse rise / fall time | 300 ns / 150 ns | |
| CEX | Master or slave ± 10 % of nominal frequency | |
| Frequency tuning | Within ± 10 % of nominal frequency | |
| Interfaces |
EtherCAT®, RS232, RS485, analog |
|
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Synertia® RF Power Delivery Platform
Synertia® RFM
Built for speed, accuracy, precision and repeatability.
The Synertia® RFM works in powerful synergy with the Synertia® RFG. Precise sensors and an enhanced tuning algorithm in the matching network ensure consistent and stable plasma processes.
Features
- Precise and repeatable input/output sensors
- Advanced multi-level pulsing with the ability to set custom tuning parameters
- Ability to work with a combination of various tuning elements
- Onboard monitoring and diagnostics to assist with preventive maintenance
- Ultra wide-band sensors
Benefits
- Continuous process improvement via real time signal processing and data collection
- Superior process control and repeatability with fully digital and customizable controls
- Consistent, stable RF plasma with enhanced tuning algorithm
- Reduced total cost of ownership with improved MTBF and enhanced reliability
- Robust design with RF expertise, state-of-the-art modeling/virtual prototyping and extensive library of RF tuning circuits
Technical data
| Frequencies | 400 kHz - 100 MHz |
| Input power | 600 W to 20 kW |
| Output V/l |
max. current (~150 ARMS), |
| Pulsing | Single, dual and multi-level |
| User interface |
EtherCAT®, RS232, analog, advanced user interface |
| Optional sensor capabilities | Vpp, Vdc and others |
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