Designed for highest stability into dynamic loads.
cito Plus offers superior pulsing quality, stability and power measurement accuracy, making it the best choice for plasma deposition and etch applications, as well as for non-semiconductor applications.
- High up time - focus on throughput and lower operating costs
- Value in accuracy, repeatability and stability - meet your process requirements
- Higher power efficiency - better economics and environmental friendly footprint
Features
- Symmetrical open loop response
- High accuracy power control
- Pulsing up to 100 kHz
- CEX with variable phase delay
- CEX output frequency divider
- SEMI compliant
Load power into 3:1 VSWR
Symmetrical open loop response
Consider cito Plus for upgrades and replacements
- Better stability over what is on the tools now
- Can be used for Bias and source
The Plug & Play system offers you
- Available interfaces: Analog, RS-232C, Ethernet, Profibus, Matching network control
- Coaxial cable insensitivity – no need to adjust for length – keep the same cables
- Air-cooled, no cooling lines
- Easy user friendly front panel control or passive panel
- AC input large range covered 230 V AC nominal, single phase
Flyer
Development and Optimization of Single Filament Plasma Jets for Wastewater Decontamination
The University of Bucharest has studied how single-wire plasma jets can be developed and optimized for wastewater treatment. In this process a cito Plus generator was involved.