Designed for the most demanding semiconductor and thin film applications
- Built for speed, accuracy, precision and repeatability
- Self-sensing pulsing (no external signals required)
- Highly optimized drive system with minimal backlash for superior process to process repeatability
- Frequency tuning supported
- Optional VI Sensor
Target market segments
- Semiconductor – 200 mm / 300 mm
- FPD – LCD, OLED, Encapsulation
- MEMS – TSV