Flexible and affordable
- Ideal for non-critical semiconductor and thin film applications
- Best value without full price
- Full user interface with Comet RF generators
- Adjustable tap settings for wide tune ranges in a compact design
- Pulsing compatible with Comet RF generators
Target market segments
- Solar
- R&D
- Semiconductor design and development
- Universities - Industrial coatings
Power |
Frequency |
Cooling |
RF output |
||
| W | 13 MHz | 27 MHz | 40 MHz | ||
| 1000 | X | X | X | Air | 7/16 DIN, MC10, Mount Bar |
| 2000 | X | Air | MC10, Mount Bar | ||
| 3000 | X | Air | MC10, Mount Bar | ||
| 5000 | X | Water | MC10, Mount Bar | ||
Matched performance
Build your RF delivery system by combining an AGS Impedance Matching Network and a Comet cito Plus RF Generator.
High performance, high reliability and precise control of plasma processes at a competitive price.
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