Flexible and affordable

  • Applicable for non-critical semiconductor, thin film applications and industrial use
  • Adjustable tap settings for wide tune ranges
  • Compact design
  • Compatible with Comet's cito Plus RF generator
  • Best price-performance ratio

Target market segments

  • Solar
  • R&D
    - Semiconductor design and development
    - Universities
  • Industrial coatings

Power

Frequency

 

Cooling

RF output

W 13 MHz 27 MHz 40 MHz    
1000 X X X Air 7/16 DIN, MC10, Mount Bar
2000     X Air MC10, Mount Bar
3000 X     Air MC10, Mount Bar
5000 X     Water MC10, Mount Bar

Matched performance

Build your RF delivery system by combining an AGS Impedance Matching Network and a Comet cito Plus RF Generator.

High performance, high reliability and precise control of plasma processes at a competitive price.

Flyer

Build to Specifitation

Build to Print

Overview