Improve process repeatability, yield and throughput

Our RF design engineers create a full range of industry leading matching network solutions that meet or exceed your specifications and time to market.

Comet RF Impedance Matching Networks regularly outperform those of our competitors. Our sensors and controls combine to make some of the fastest tuning matching networks in the industry.

Unlike other matching network suppliers, Comet has a full line of variable vacuum capacitors and the experts to design these key elements. With close collaboration between the two teams, Comet is in the unique position to create products that no other competitor can offer.

NEW!

Synertia®
Matching Networks

Built for speed, accuracy, precision and repeatability.

The Synertia® RFM works in powerful synergy with the Synertia® RFG. Precise sensors and an enhanced tuning algorithm in the matching network ensure consistent and stable plasma processes.

Comet match product lines

Specifically designed for three types of customers and their individual requirements.

Build to Specification

Highest performance

Designed for the most demanding semiconductor and critical thin film applications.

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Build to
Print

Your design, our quality

Outsource your match design to the experts.

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AGS
Standard Matches

Flexible and affordable

Affordable yet retains Comet quality.

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Impedance Matching Networks

Build to Specification

Designed for the most demanding semiconductor and thin film applications

  • Built for speed, accuracy, precision and repeatability
  • Self-sensing pulsing (no external signals required)
  • Highly optimized drive system with minimal backlash for superior process to process repeatability
  • Frequency tuning supported
  • Optional VI Sensor 

Target market segments

  • Semiconductor – 200 mm / 300 mm
  • FPD – LCD, OLED, Encapsulation
  • MEMS – TSV

Impedance Matching Networks

Build to Print

Outsource your match design to the experts

  • Let Comet productize your existing design and ensure high quality by world class test and manufacturing engineering to an existing design
  • Customer retains IP for competitive advantages
  • Built alongside Comet’s own products
  • Predictable lead times and ability to ramp volumes unlike built to print shops

Target market segments

  • Semiconductor
  • FPD

Impedance Matching Networks

AGS Matches

AGS product range

Flexible and affordable

  • Ideal for non-critical semiconductor and thin film applications
  • Best value without full price
  • Full user interface with Comet RF generators
  • Adjustable tap settings for wide tune ranges in a compact design
  • Pulsing compatible with Comet RF generators

Target market segments

  • Solar
  • R&D
    - Semiconductor design and development
    - Universities
  • Industrial coatings

Power

Frequency

  

Cooling

RF output
W 13 MHz 27 MHz 40 MHz    
1000 X X X Air 7/16 DIN, MC10, Mount Bar
2000     X Air MC10, Mount Bar
3000 X     Air MC10, Mount Bar
5000 X     Water MC10, Mount Bar

Matched performance

Build your RF delivery system by combining an AGS Impedance Matching Network and a Comet cito Plus RF Generator.

High performance, high reliability and precise control of plasma processes at a competitive price.

 

Flyer

Catalog

A compact summary of Comet's RF expertise and the product range can also be found in our catalogue. Have a look online or order your print version.

Want to know more?

Ask our local teams

Contact

Specific requests?

Get a quotation for your specific needs

Inquiry form

RF Cable Sets

Find the appropriate coaxial and control cable set

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