Improve process repeatability, yield and throughput
Our RF design engineers create a full range of industry leading matching network solutions that meet or exceed your specifications and time to market.
Comet RF Impedance Matching Networks regularly outperform those of our competitors. Our sensors and controls combine to make some of the fastest tuning matching networks in the industry.
Unlike other matching network suppliers, Comet has a full line of variable vacuum capacitors and the experts to design these key elements. With close collaboration between the two teams, Comet is in the unique position to create products that no other competitor can offer.
NEW!
Synertia®
Matching Networks
Built for speed, accuracy, precision and repeatability.
The Synertia® RFM works in powerful synergy with the Synertia® RFG. Precise sensors and an enhanced tuning algorithm in the matching network ensure consistent and stable plasma processes.
Comet match product lines
Specifically designed for three types of customers and their individual requirements.
Build to Specification
Highest performance
Designed for the most demanding semiconductor and critical thin film applications.
Learn more
Build to
Print
AGS
Standard Matches
Impedance Matching Networks
Build to Specification
Designed for the most demanding semiconductor and thin film applications
- Built for speed, accuracy, precision and repeatability
- Self-sensing pulsing (no external signals required)
- Highly optimized drive system with minimal backlash for superior process to process repeatability
- Frequency tuning supported
- Optional VI Sensor
Target market segments
- Semiconductor – 200 mm / 300 mm
- FPD – LCD, OLED, Encapsulation
- MEMS – TSV
Impedance Matching Networks
Build to Print
Outsource your match design to the experts
- Let Comet productize your existing design and ensure high quality by world class test and manufacturing engineering to an existing design
- Customer retains IP for competitive advantages
- Built alongside Comet’s own products
- Predictable lead times and ability to ramp volumes unlike built to print shops
Target market segments
- Semiconductor
- FPD
Impedance Matching Networks
AGS Matches
Flexible and affordable
- Ideal for non-critical semiconductor and thin film applications
- Best value without full price
- Full user interface with Comet RF generators
- Adjustable tap settings for wide tune ranges in a compact design
- Pulsing compatible with Comet RF generators
Target market segments
- Solar
- R&D
- Semiconductor design and development
- Universities - Industrial coatings
Power |
Frequency |
Cooling |
RF output |
||
W | 13 MHz | 27 MHz | 40 MHz | ||
1000 | X | X | X | Air | 7/16 DIN, MC10, Mount Bar |
2000 | X | Air | MC10, Mount Bar | ||
3000 | X | Air | MC10, Mount Bar | ||
5000 | X | Water | MC10, Mount Bar |
Matched performance
Build your RF delivery system by combining an AGS Impedance Matching Network and a Comet cito Plus RF Generator.
High performance, high reliability and precise control of plasma processes at a competitive price.
Flyer
Catalog
A compact summary of Comet's RF expertise and the product range can also be found in our catalogue. Have a look online or order your print version.
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